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Glow discharge apparatus Coolglow

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Glow discharge apparatus Coolglow

Classification:

SuPro

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  • Detail

    ● The induction RF discharge mode significantly reduces the thermal impact of plasma on the sample and ion bombardment damage;

    ● It is particularly suitable for cleaning, surface activation, hydrophilization, etc. of TEM or SEM biological samples that are sensitive to temperature or bombardment.

    Technical parameters:

    Pump Group

    Mechanical pump; oil-free dry pump can be upgraded as an option

    Pumping speed

    >2 m3/h

    Ultimate vacuum

    <2 Pa

    Vacuuming time

    <1 min

    Vacuum gauge

    German Leybold Pirani vacuum gauge

    Sample chamber size

    Ф150 ×90 mm scratch-resistant quartz glass

    RF Source

    Target source size Ф80 mm

    RF Power

    Adjustable power operating range: 10-50 W, 13.56 MHz

    Working pressure

    10-100 Pa

    Gas Control

    Constant pressure closed loop control

    How it works

    Touch screen control

    Weight and size

    ~25kg/440mm wide*310mm deep*380mm high

    Power consumption

    <500 W

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Glow discharge apparatus

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