- Commodity name: Probe station microscope MOTIC PSM-1000
The brand new integrated design features excellent optical imaging quality and a user-friendly positive image optical system, making it an ideal tool for detecting semiconductor devices. It supports three laser wavelengths and can be used for laser cutting and thin film technology in semiconductor and liquid crystal substrates. It can be widely applied in the manufacturing and research fields of semiconductor, electronics, metallurgy and other industries.

characteristic:

● Head of Human Machine Engineering

The PSM-1000E binocular observation head can rotate between 3 ° -30 ° to adjust the height and direction of the observation eye points, making it more comfortable for the operator to use.

● tube lens

The PSM-1000 tube mirror turntable is equipped with 1X NUV, 1X NIR, and 2X tube mirrors, and the three sets of tube mirrors can be switched as needed, making switching simple and convenient. Among them, 1X NUV was optimized for 355nm and 532nm wavelengths, and 1X NIR was optimized for 532nm and 1064nm wavelengths. When using lasers with these three wavelengths, better laser transmittance can be obtained.

● Optical path switching lever

By pushing and pulling the light path conversion lever, it is easy to switch the light path. When the conversion lever is pulled outward, the spectral ratio between the binocular head and the camera interface is 0:100. At this time, 100% of the laser incident from the camera interface enters the optical path, improving the laser efficiency; When the converter lever is pushed inward, the spectral ratio between the binocular head and the camera interface is 50:50. At this time, the binocular head can be used for observation, and CCD cameras or lasers can also be used on the camera interface.

● Polarized observation

There is a polarizing socket on the main body, and a polarizing accessory (optional accessory) can be inserted for polarizing observation.

● Focuser

The focusing mechanism of PSM-1000 rotates comfortably and works reliably. The focusing mechanism can support a maximum weight of 45 pounds (20.4Kg), ensuring that it can still function properly after installing the laser and CCD camera.

● converter

The PSM-1000 uses a 4-hole adjustable centering converter and a randomly distributed centering key to easily adjust the alignment of the objective lens.

● objective

The PSM-1000 adopts a stress free flat field apochromatic objective lens with a long working distance, providing excellent imaging quality. For specific parameters of the objective lens, please refer to the APO objective lens sample.

● Digital camera system

According to the CCD size of the CCD camera used, select the appropriate camera connector, install it on the camera interface, and form a digital camera system, which can be synchronously observed on a computer, television, or monitor.

● Lighting

Adopting a coaxial vertical lighting system, the light source adopts an external cold light source. The 2m long lighting fiber and light source remote control (optional) provide PSM-1000 with more freedom of operation space.

● Detection workstation

The main body of PSM-1000 can be installed on a detection workstation for testing silicon wafers.

● Laser device

The camera interface of PSM-1000 is equipped with a laser safety positioning pin, and there is a position for installing a laser safety filter in front of the binocular heads, and compensation pads are provided. Without the need for a dedicated laser toolbox, it is easy to install the laser and laser safety filter.