- Commodity name: Spicer Consulting SC26
Changes in the magnetic field in the fab can deflect the electron beam and cause image resolution to decrease or image distortion. The SC26 active degaussing system can provide a stable reverse magnetic field in response to the dynamic changes of the external magnetic field to improve the image quality.

The SC26 active demagnetization system consists of a magnetic field controller, one or two 200 kHz AC field sensing probes and a triaxial low inductance field elimination coil, and is installed in the fab to generate reverse magnetic fields and improve external magnetic field problems.

There are three power amplifiers in the controller, which mainly drive the current through the magnetic field coil and generate a relative magnetic field to improve the magnetic field interference around the instrument, and can eliminate the magnetic field from DC to more than 9 kHz. The sensing probe measures the improved magnetic field strength and feeds back to the control system to adjust the loop gain value.

● Working range: DC/25 Hz-60 kHz

● Improve external magnetic field interference to meet the requirements of electron beam instrument magnetic field specifications

● From DC to > Real-time wideband elimination of 9 kHz field

● Adapt to changes in amplitude and frequency of the field within 10 microseconds

● The panel displays both AC and DC magnetic field values and can select different units (Tesla or Gauss units)

● Dual sensing probe setup can generate a virtual sensor in the electron gun

● Intelligent touch panel with automatic parameter setting and DC magnetic field reset function

● Controller with magnetic field generation test function

● Ethernet and USB port options for remote operation and monitoring