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DVIA-P Series active pneumatic vibration isolator
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DVIA-P Series active pneumatic vibration isolator
The DVIA-P series is designed to provide shock isolation for semiconductor manufacturing. When wafer fabrication processes a complete electrical or photonic integrated circuit on a linear motorized platform, vibrations occur across the entire instrument, and semiconductor devices are very sensitive to low-frequency vibrations. In these cases, the DVIA-P series minimizes vibration through a pneumatic actuator and determines the residual motion that isolates the payload.
Classification:
Active Vibration Isolation Platform
DAEIL
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The DVIA-P series is designed to provide shock isolation for semiconductor manufacturing. When wafer fabrication processes a complete electrical or photonic integrated circuit on a linear motorized platform, vibrations occur across the entire instrument, and semiconductor devices are very sensitive to low-frequency vibrations. In these cases, the DVIA-P series minimizes vibration through a pneumatic actuator and determines the residual motion that isolates the payload.
● Active isolation 0.5-150Hz;
● The feedforward control system of the moving table can measure the displacement simulation output and acceleration data of the moving table parts in real time, reducing the interference caused by the moving parts;
● The position sensor continuously measures the position of the isolation platform through the digital signal processor, and keeps it in the original position with high accuracy;
● Digital controller samples vibration synchronously, calculates all vibration and control forces of 6 axes in real time, and drives pneumatic actuators for vibration isolation.
Contact Information
Please leave the demand accurately for accurate matching and fast docking, or call the service hotline directly. 021-64301021
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