Piezoelectric active damping system(SEM-Base®VI)
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Piezoelectric active damping system(SEM-Base®VI)
Classification:
Active Vibration Isolation Platform
TMC
- Detail
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SEM-BASE-@VI adopts a unique series structure, and the vibration sensor measures the ground vibration, not the load vibration. This ensures that the load vibrations will not limit the vibration isolation of the platform or cause instability. The vibration sensor uses a low frequency inertial velocity sensor for maximum sensitivity when measuring subhertz vibrations. Coupled with TMC's unique piezoelectric actuation technology, SEM-BASE-@VI achieves ultra-high levels of vibration elimination even on already well-vibrated surfaces.
● Active inertial vibration elimination system
● Suitable for most commercial SEMs
● Isolation efficiency 1Hz:40-70%; Isolation efficiency 2Hz:90%
● Easy installation, simple tuning
● Compatible with the built-in vibration isolation system of all devices
● Casters can be installed, easy to move, no need to carry
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